发明名称 SEMICONDUCTOR ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method for clipping a semiconductor element capable of improving a product yield. SOLUTION: The method for manufacturing a semiconductor element for acquring a plurality of semiconductor elements comprises a step of cutting a semiconductor wafer W with a plurality of semiconductor elements 2 formed in matrix through a gap part having the predetermined width. The method for manufacturing the semiconductor element further comprises the steps of forming a cutting groove 16 at the gap part by a first cutting edge 14 having a thickness not more than the predetermined width, filling and hardening a resin 20 in the cutting groove, and forming a contour protecting resin layer 4 comprising the resin to the cut cross section of the semiconductor element in the uniform thickness by cutting the resin hardened by the resing filling step along the direction with the cutting groove extended with the use of a second cutting edge 22 thinner than the first cutting edge. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008016604(A) 申请公布日期 2008.01.24
申请号 JP20060185654 申请日期 2006.07.05
申请人 VICTOR CO OF JAPAN LTD 发明人 TAKAHASHI SHINJI
分类号 H01L21/56;H01L21/02;H01L21/301 主分类号 H01L21/56
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