摘要 |
A method for producing a thin film lithium battery is provided, comprisin g applying a cathode current collector, a cathode material, an anode current collector, and an electrolyte layer separating the cathode material from th e anode current collector to a substrate, wherein at least one of the layers contains lithiated compounds that is patterned at least in part by a photol ithography operation comprising removal of a photoresist material from the l ayer containing lithiated compounds by a process including a wet chemical tr eatment. Additionally, a method and apparatus for making lithium batteries b y providing a first sheet that includes a substrate having a cathode materia l, an anode material, and a LiPON barrier/electrolyte layer separating the c athode material from the anode material; and removing a subset of first mate rial to separate a plurality of cells from the first sheet. In some embodime nts, the method further includes depositing second material on the sheet to cover the plurality of cells; and removing a subset of second material to se parate a plurality of cells from the first sheet. |