| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a device therefor capable of producing a uniform grating on the surface of a workpiece without receiving the limitation of an interference region in a pulse laser. <P>SOLUTION: The laser beam machining device comprises: a laser diffracting grating arranged in such a manner that a laser is vertically made incident to a grating face; a mirror arranged in such a manner that±first-order diffracted light diffracted at a diffraction angleθis crossed on the machining face of a workpiece; a means for moving the diffraction grating to the periodic direction of the grating; a means for moving the workpiece to the periodic direction of interference; and a movement controller for controlling each movement means, and the movement controller controls each movement means so as to satisfy V=U×sinθ/sinθ'; whereinθ: the diffraction angle of the first-order diffracted light;θ': the interference angle of the laser; U: the moving velocity of the optical axis of the laser made incident on the diffracting grating; and V: the moving velocity of the crossed point of the±first-order diffracted light of the surface in the workpiece. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
