| 摘要 |
PROBLEM TO BE SOLVED: To provide a characteristics measuring apparatus which, when some abnormalities have occurred in a measuring tool or the like, can detect the abnormalities at an early stage and efficiently. SOLUTION: Electronic components manufactured from the same lot are separately supplied to a plurality of measuring lines L1, L2, L3, or the like. The measuring tool 12 is electrically connected to an external electrode of the electronic component to apply measuring voltage, while the electrical characteristics of the electronic component are measured by a measuring instrument 14, the measuring line abnormality detection section 18 decides, when the difference between the measured values in a certain range from the measuring lines L1, L2, L3, or the like, exceeds a predetermined threshold, that an abnormality has occurred in either measuring line. COPYRIGHT: (C)2008,JPO&INPIT
|
