IMPRINTING DEVICE AND IMPRINTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an imprinting device which can precisely transfer a pattern by preventing air bubbles from remaining between a stamper and an object to be transferred. SOLUTION: This imprinting device A1 is used for transferring the shape of the surface of the stamper 2 by bringing the object to be transferred 1 and the stamper 2 in contact with each other. The device A1 is equipped with a retaining means which retains the object to be transferred 1 and the stamper 2 apart from each other as specified, a pressure reducing means which reduces the internal pressure of a chamber holding the object to be transferred 1 and the stamper 2, and a position-adjusting means which adjusts the relative positions of the object to be transferred 1 and the stamper 2. COPYRIGHT: (C)2008,JPO&INPIT