| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost processing device which secures small measurement error. SOLUTION: Length measuring units 29a, 29b and a processing unit 39 are arranged in such a manner that the extended lines of laser beams emitted from the length measuring units 29a, 29b intersect the working position of the processing unit 39 at one point. The laser beams branching from the length measuring units 29a, 29b are directed to the processing unit 39 and a workpiece holding platform 35, and the relative positions of the processing unit 39 and the workpiece holding platform 35 is measured on the basis of the laser beam directed to the processing unit 39. COPYRIGHT: (C)2008,JPO&INPIT
|
