POLISHING PAD HAVING MICRO-GROOVES ON THE PAD SURFACE
摘要
A polishing pad is provided herein, which may include a plurality of soluble fibers having a diameter in the range of about 5 to 80 micrometers, and an insoluble component. The pad may also pad include a first surface having a plurality of micro-grooves, wherein the soluble fibers form the micro-grooves in the pad. The micro-grooves may have a width and/or depth up to about 150 micrometers. In addition, a method of forming the polishing pad and a method of polishing a surface with the polishing pad is disclosed.
申请公布号
WO2008011535(A2)
申请公布日期
2008.01.24
申请号
WO2007US73921
申请日期
2007.07.19
申请人
INNOPAD, INC.;HSU, OSCAR, K.;JIN, MARC, C.;WELLS, DAVID, ADAM;ALDEBORGH, JOHN, ERIK
发明人
HSU, OSCAR, K.;JIN, MARC, C.;WELLS, DAVID, ADAM;ALDEBORGH, JOHN, ERIK