<p>A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.</p>
申请公布号
WO2008010927(A2)
申请公布日期
2008.01.24
申请号
WO2007US15653
申请日期
2007.07.09
申请人
CYMER, INC.;MELCHIOR, JOHN, T.;UJAZDOWSKI, RICHARD, C.;HOWEY, JAMES, K.
发明人
MELCHIOR, JOHN, T.;UJAZDOWSKI, RICHARD, C.;HOWEY, JAMES, K.