DIAMOND/CARBON NANO-MATERIALS HYBRID FILM AND THE FABRICATION METHOD THEREOF

摘要

A diamond/carbon nano-material hybrid film and a fabricating method thereof are provided to fabricate the diamond/carbon nano-material hybrid film by using laminated porous silica spheres as a matrix and duplicating gas chemistry near the sample. A diamond film(4-1) is formed on one surface of a matrix, and a carbon nano material film(4-2) is formed on the other surface thereof. A sample set, in which matrix particles(1) are laminated at least by a layer on a substrate and spaces are ensured between a substrate and the matrix particles and between the matrix particles, is prepared. The sample set is put into an apparatus for synthesizing CVD diamond. A gas including hydrogen and carbon is introduced into the apparatus, and then a plasma is produced to form a diamond film on an upper portion of the matrix particles and a carbon nano-material film on a lower portion of the matrix particles.