| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for inspecting another part with high flaw detection sensitivity, while preventing the edge part of an image from being detected as flaw, in an image flaw inspection system. <P>SOLUTION: The image flaw inspection system 40 is constituted so as to set a margin value at each pixel on the basis of the edge image data D5 formed from reference image data D1, and the flaws of the image are inspected by using the margin value different at each pixel. Accordingly, for determining the presence of the flaw, margin values different in the edge part A3 and other regions A1 and A2 are used. As a result, the other parts A1 and A2 can be inspected with high flaw detection sensitivity, while preventing the edge part A3 from being detected as a flaw. <P>COPYRIGHT: (C)2008,JPO&INPIT |
