| 摘要 |
PROBLEM TO BE SOLVED: To inspect even a large-size substrate by a small-size substrate inspection device. SOLUTION: In this substrate inspection device 1, a microscope unit 32 is loaded movably on a guide member 30 parallel to the X-direction which is a conveyance direction of a substrate W. The movable range of the microscope unit 32 in the X-direction is smaller than the length of the substrate W, and both a range which inspectable by the microscope unit 32 and a range non-inspectable thereby exist. When inspection of the inspectable range is finished, the non-inspectable range is moved under a movable range of the microscope unit 32, by moving a conveyance device 3, and then inspection is carried out. COPYRIGHT: (C)2008,JPO&INPIT
|
