| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate measuring device capable of measuring a minute flow rate, and to provide a liquid feeding apparatus capable of metering and feeding a minute amount of liquid. SOLUTION: A boundary surface between gas and fluid 20 flowing in a liquid feeding pipe 14 is detected by using a boundary surface sensor 18. When the boundary surface is detected, gas 30 is injected through a gas injection point 26 disposed on the upstream position of the boundary surface sensor 18. The fluid 20 in the liquid feeding pipe 14 is split by the gas 30. The fluid 20 is further fed, and when the injected gas 30 reaches the position of the boundary surface sensor 18, and then the boundary surface between the gas and liquid is detected, gas is injected again through the gas injection point 26 in order to split the liquid. A time interval at which the boundary surface is detected, is measured, thereby computing the flow rate. Moreover, a prescribed amount of fluid can be metered from the number of detection times of the boundary surface. COPYRIGHT: (C)2008,JPO&INPIT
|
