| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-reliable, high-precision, and high-resolution two-dimensional encoder having a two-dimensional ABS pattern adaptable to a two-dimensional linear scale. SOLUTION: The encoder acquires an image of a bit pattern on a scale by a detector to detect the relative displacement between the scale and the detector. A bit pattern, modulated so as to have a common part, is arranged in a first direction and is also in a second direction, which is perpendicular to the first direction, with the same bit pattern being displaced by each one bit. COPYRIGHT: (C)2008,JPO&INPIT
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