| 发明名称 |
OVERHEAD TRANSFER FLANGE AND SUPPORT FOR SUSPENDING A SUBSTRATE CARRIER |
| 摘要 |
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
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| 申请公布号 |
US2008019810(A1) |
申请公布日期 |
2008.01.24 |
| 申请号 |
US20070838501 |
申请日期 |
2007.08.14 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE MICHAEL R.;ELLIOTT MARTIN R.;LOWRANCE ROBERT B.;HUDGENS JEFFREY C.;ENGLHARDT ERIC A. |
| 分类号 |
B65G49/07;H01L21/00;H01L21/677;H01L21/68 |
主分类号 |
B65G49/07 |
| 代理机构 |
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| 主权项 |
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