Acceleration sensor, has seismic mass designed as frame and connected with middle bar, and right bar arranged on side of middle bar over substrate, where dovetails are formed on seismic mass and right and left bars

摘要

The sensor has a middle bar (1) arranged over a substrate, and a right bar (2), which is arranged on a side of the middle bar over the substrate. A left bar (3) is arranged on another side of the middle bar, and dovetails (7, 8) are formed on a seismic mass (9) and the right and left bars. The seismic mass is designed as a frame and is connected with the middle bar, where the middle bar is connected with the substrate by a central anchor (4). The right bar and left bar are respectively connected with the substrate by the anchor (5) and anchor (6).