INSPECTION DEVICE, INSPECTION SYSTEM, AND INSPECTION PROGRAM OF SELECTIVE BONDING SUBSTANCE IMMOBILIZING CARRIER

摘要

PROBLEM TO BE SOLVED: To provide an inspection device, an inspection method, and an inspection program of a selective bonding substance immobilizing carrier capable of accurately inspecting a target even when it is an uneven carrier.

SOLUTION: The inspection device evaluates a spot by storing spot image data on a carrier detected by a detecting means; partitioning a plurality of protrusions one by one on an image, storing mask data of outside and inside of cross sections in each partition; binarizing the image data stored by setting in the case that a detecting intensity by the detecting means in each pixel is more than the threshold for binarization as 1, and as 0 in case that is less than the threshold for binarization; creating inspecting image data by overlapping the binarized image data and the mask data based on a protrusion configuration; counting the number of pixels set as 1 for every partition for all partitions of created mask images; and evaluating the counted number using the threshold for evaluating the inside of the cross section.

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