| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection apparatus enabling efficient creation of an inspection recipe for a test sample, to the inspection efficiency. SOLUTION: A substrate inspection apparatus includes an inspection section for imaging a pattern to extract a surface defect, and a control section 1B for controlling the operation of the inspection section based on control parameters. The apparatus further includes a control parameter calculation means 32 for calculating the control parameters from design data representing pattern formation conditions. The control parameters are organized into a recipe file by a recipe file organization section 36. The recipe file can be corrected by a recipe file correction section 35 based on light control results. COPYRIGHT: (C)2008,JPO&INPIT
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