发明名称 DYNAMIC RANDOM ACCESS MEMORY AND FABRICATION METHOD THEREOF
摘要 A dynamic random access memory including a substrate, an isolation structure, two transistors, two trench capacitors and two passing gates is provided. The isolation structure, including a first isolation structure and a second isolation structure, is disposed in the substrate. The second isolation structure is disposed in the substrate above the first isolation structure and the bottom surface of the second isolation structure is lower than the top surface of the substrate. The periphery of the second isolation structure is beyond that of the first isolation structure. The transistors are disposed on the substrate respectively at two sides of the isolation structure. The trench capacitors are respectively disposed between the transistors and the isolation structures. A portion of the second isolation structure is disposed in the trench capacitor. The passing gates are completely disposed on the second isolation structure.
申请公布号 US2008020539(A1) 申请公布日期 2008.01.24
申请号 US20070865542 申请日期 2007.10.01
申请人 WANG CHIEN-KUO;HUANG JUN-CHI;LEE RUEY-CHYR;LIN YUNG-CHANG 发明人 WANG CHIEN-KUO;HUANG JUN-CHI;LEE RUEY-CHYR;LIN YUNG-CHANG
分类号 H01L21/02 主分类号 H01L21/02
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