DEFLECTOR ARRAY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

This invention discloses a deflector array in which a plurality of deflectors which deflect charged particle beams are arrayed on a substrate. Each deflector includes an opening formed on the substrate, and a pair of electrodes opposing each other through the opening. The length of the pair of electrodes in the longitudinal direction is not less than the distance between the centers of two deflectors equivalent to the plurality of deflectors, which are located nearest to each other.