PHASE CHANGE MEMORY CELL INCLUDING NANOCOMPOSITE INSULATOR

摘要

A phase change memory cell including a nano-composite insulator is provided to reduce the size of a memory by inducing low power for driving small devices. A phase change memory cell includes first and second electrodes(208,210), a store material, and a nano-composite insulator(218). The store material is formed between the first and second electrodes. The nano-composite insulator is contacted with the store material. The store material is a phase change memory material. The nano-composite insulator includes nano-composite clusters which define the size of the clusters with 1 to 5nm. The nano-composite insulator is deposited as a layer having a thickness of 5 to 30nm.