REPAIRING METHOD OF ELECTROSTATIC SUCKING ELECTRODE

摘要

A method for repairing an electrostatic sucking electrode is provided to simply and properly repair a damaged part of the electrostatic sucking electrode when the damage is generated at a coating layer of the electrostatic sucking electrode. A method for repairing an electrostatic sucking electrode includes the steps of: cutting a circumference of a crack(100) by using a cutting unit(201) and forming a concave part into a taper(51); spraying a dielectric material(60) to bury the concave portion by using a spray apparatus(202); and flatting a puffed part generated at the spraying process by using the cutting unit and forming a repairing thin film approximately corresponding to a second dielectric layer. The crack is generated at a second insulation layer(44) which is formed on an electrode layer(43).