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经营范围
发明名称
WAFER HEATING APPARATUS
摘要
申请公布号
KR100798179(B1)
申请公布日期
2008.01.24
申请号
KR20020022942
申请日期
2002.04.26
申请人
发明人
分类号
H01L21/324;H01L21/00;H05B3/14;H05B3/26;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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