| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a forming method of a carbon nanotube structure capable of synthesizing a CNT of high quality at low temperatures, and to provide a manufacturing method for a field emission element that utilizes the same. <P>SOLUTION: The forming method of a carbon nanotube structure comprises a process for forming an electrode 112 on a substrate 110, a process for forming a buffer layer 125 on the electrode 112, a process for forming a granular catalyst layer 130 on the buffer layer 125, a process for applying etching on the buffer layer 125 exposed through the catalyst layer, and a process for making carbon nanotubes 150 grow from the catalyst layer 130, installed on the buffer layer 125 applied etching. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
