| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser optical system and a laser annealing device, wherein linear light beams in which a light intensity distribution in a short side direction has a top flat shape can be easily materialized with a simple structure. SOLUTION: The laser optical system for irradiating linear beams has a cross-sectional shape which is long in a Y direction perpendicular to an optical axis and is narrow in an X direction perpendicular to the optical axis and the Y direction toward an object 6. The laser optical system is constituted of a beam shift optical system 3 for branching light beams 2 from a laser oscillator 1 into a plurality of light beams in the Y direction, and for relatively displacing each of the light beams in the X direction; a homogenized optical system 4 for making uniform the light intensity distribution regarding the Y direction for each of the branched light beams; a condensing optical system 5 for condensing the uniform light beams on the object 6; and the like. COPYRIGHT: (C)2008,JPO&INPIT
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