| 摘要 |
PROBLEM TO BE SOLVED: To distribute functions for simplifying structure and to make rigidity improved. SOLUTION: A probe card automatic exchanging mechanism automatically exchanges probe cards according to kind of a semiconductor wafer. The mechanism comprises a card-fixing part which fixes and supports the probe card; a card-transport part which transports probe card between the card fixing part and the outside; and a card-exchanging part which removes the probe card fixed to the card-fixing part and shifts it to the card transport part; and then attaches a new probe card that has been shifted down to immediately under the card fixing part by the card transport part, to the card-fixing part. The card exchanging part comprises a clamp for supporting a card holder, a rotation ring which vertically moves the clamp, a rotational driver for rotates the rotating ring, and a holder rotating mechanism which makes the card holder rotate, and the holder rotating mechanism is provided to the card transport part side. COPYRIGHT: (C)2008,JPO&INPIT
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