| 摘要 |
PROBLEM TO BE SOLVED: To detect abnormal characteristics that rarely exists in a semiconductor device including a memory. SOLUTION: A Raman spectroscopy device 21 performs a Raman scattering spectroscopy method-based analysis to each of regions equivalent to a memory between 5 bits and 100 bits in the semiconductor device, and obtains a peak wave number or a wave number width in analysis data representing wave number dependence of signal strength. A statistical processing unit 29 calculates a cumulative distribution related to the obtained peak wave number or wave number width. A data obtaining unit 32 obtains a primary distribution and an end distribution that departs the primary distribution in the calculated cumulative distribution, to thereby obtain an intersection coordinate of normal distribution curves when each distribution is approximated by a normal distribution curve. A data display unit 33 determines whether the intersection coordinate satisfies a predetermined condition to display a determination result. COPYRIGHT: (C)2008,JPO&INPIT
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