| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece inspection method and an inspection device for rapidly and accurately inspecting a workpiece by an inexpensive device. SOLUTION: A defect inspection device 1 is equipped with a camera 3 for obtaining a surface image of the workpiece W. The camera 3 has an inspected part W3 such as a circuit formed on a surface of the workpiece W and alignment marks W1 and W2 for position adjustment formed on the workpiece W. The camera 3 also acquires images of the alignment marks W1 and W2 when acquiring an image of the inspected part W3. A device body 4 detects displacement of the workpiece W from image data on the alignment marks W1 and W2, and makes a necessary correction to data on a position where a defect has been found. COPYRIGHT: (C)2008,JPO&INPIT
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