| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection system, equipped with a processing recipe that can cope with the mode of individual substrate or with the individual differences among inspectors. SOLUTION: The visual inspection system is equipped with an illumination part for irradiating a thin plate-like substrate with light and a substrate support part made shakable in a substrate holding state and is also equipped with a processing recipe forming means, which acquires the inspection data of the substrate acquired by another inspection system, before the substrate is inspected by the visual inspection system (S406) and automatically calculates the inspection conditions readily, visually observed by the inspector by inputting the inspection data to a preformed table (S408) to form the processing recipe (S409); and an execution means for operating the visual inspection system, in accordance with the processing recipe formed by the processing recipe forming means (S411). COPYRIGHT: (C)2008,JPO&INPIT
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