| 摘要 |
PROBLEM TO BE SOLVED: To draw an extremely fine line pattern without any defect, using a liquid jet technique. SOLUTION: In this liquid jet system, a target is arranged in a position shown in a bold line before a liquid jet ejected from a nozzle of a liquid jet head could break into a plurality of liquid droplets. Further, as shown in the flight geometry (E), this liquid jet system is configured in the way that the following liquid jet collides with the tail part of the preceding liquid jet from behind well before the head of the following the liquid jet could impact the target. Under this configuration, the following liquid jet can certainly form an impacting liquid droplet linking with the preceding liquid jet. Thus it is possible to obtain an extremely fine line without any defect. COPYRIGHT: (C)2008,JPO&INPIT
|
