| 摘要 |
Disclosed is a pressure/force transducer and a method for the production thereof, which are based on a pressure sensor produced by means of standard surface micromechanical processes. Said pressure/force transducer comprises a membrane over a (vacuum) cavity, e.g. having a height of several micrometers. The membrane is mechanically stopped on the substrate because the cavity is closed rather than being open on the side of the cavity facing away from the membrane, as is the case with pressure sensors produced according to the conventional KOH etching technique, resulting in significantly improved overload protection when used as a force sensor. In addition, the design of the cavity makes it possible to limit bending to a few micrometers such that the tightness of the cavity is not even affected in case of an overload as no fissure can be created in the membrane when the membrane is provided with adequate stiffness.
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