| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an outside case for an apparatus capable of restraining temperature rise in a machine by efficiently discharging heat accumulated in the apparatus with simple constitution, and efficiently removing in-machine contamination by contaminant. <P>SOLUTION: The outside case structure 100 for the apparatus in the outside case to cover the outer periphery of an apparatus main body is constituted by using a plurality of panel bodies 110 which are a panel for shielding 111, a panel for heat radiation 112 and a panel for in-machine scattering 113 as the plurality of panel bodies 110, and is constituted by properly combining the panel for shielding 111, the panel for heat radiation 112 and the panel for in-machine scattering 113 respectively in accordance with the processing condition of the apparatus through a frame body 120 provided on the apparatus side. <P>COPYRIGHT: (C)2008,JPO&INPIT |
