发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device with which air bubbles are prevented from being generated in a solder by an organic impurity, even in the state where the organic impurity is deposited on a pad. SOLUTION: A semiconductor substrate 10 with an electrode pad 20 provided on its surface is heated, and an organic impurity deposited on the electrode pad 20 is volatilized. A solder is subsequently formed on the electrode pad 20. The solder formed on the electrode pad 20 is continuously fused to form a solder bump on the electrode pad 20. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008016754(A) 申请公布日期 2008.01.24
申请号 JP20060188901 申请日期 2006.07.10
申请人 NEC ELECTRONICS CORP 发明人 SHIMIZU YUJI
分类号 H01L21/60 主分类号 H01L21/60
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