| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost surface inspection device capable of measuring the shape of a minute projecting/recessed defect, and its method. SOLUTION: In the surface inspection device using an optical interference technique to use a broadband laser light source, such as a semiconductor laser as an interferometer, modulation optical elements 5, 10 which perform modulation at frequencies slightly different to each other to each of two optical paths among a branched optical element 4 and a synthesized optical element 15 using the semiconductor laser with wide spectral width with a short coherent distance as a lighting source, and optical-path-length variable optical elements 8, 13 which can adjust optical path length are provided, and the interference intensity is made maximum by adjusting the optical-path-length variable optical elements 8, 13 while measuring the interference intensity. COPYRIGHT: (C)2008,JPO&INPIT
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