摘要 |
PROBLEM TO BE SOLVED: To provide a method by which a magnetic film can be uniformly etched even if a resist residue removing step is eliminated and the manufacturing cost of a patterned medium can be reduced. SOLUTION: In the manufacturing method of the magnetic recording medium, the magnetic film is formed on a substrate, a resist is applied on the magnetic film, a stamper is imprinted to the resist to transfer a rugged pattern and the magnetic film is worked by ion-milling to form a magnetic film pattern while the resist residue is left in the recessed part of the patterned resist after the stamper is removed. COPYRIGHT: (C)2008,JPO&INPIT
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