Sensors for detecting NOx in a gas and methods for fabricating the same

摘要

Nitrogen oxide sensors and methods for fabricating them are provided. According to an exemplary embodiment of the present invention, the method comprises providing an electrically insulating substrate having a first surface and a second surface. Two electrodes are fabricated on the first surface of the substrate. Each of the electrodes has a first end configured to receive a current and a second end. A nanopowder of a barium tungstate comprising nanoparticles of substantially uniform particle size is synthesized. A film of the barium tungstate nanopowder is deposited overlying the first surface of the substrate and in electrical contact with the second ends of the electrodes. The film is sintered and a heater is fabricated on the second surface of the substrate.