发明名称 RETAINER RING OF DOUBLE-LAYER STRUCTURE
摘要 <p>A retainer ring of double-layer structure that without the use of adhesive, etc., realizes robust retention of integration of first ring and second ring, ensuring uniform press force. Between first ring (11) positioned as a superior layer and second ring (12) positioned as an inferior layer, there is formed melt adhesion part (13) resulting from melting of the side of upper face (12c) of the second ring (12) and adhering thereof to the side of lower face of the first ring (11). By virtue of this melt adhesion part (13), the first ring (11) and the second ring (12) are unified.</p>
申请公布号 WO2008010310(A1) 申请公布日期 2008.01.24
申请号 WO2007JP00609 申请日期 2007.06.06
申请人 NIPPON SEMITSU DENSHI CO., LTD.;ICHINOSHIME, TSUTOMU 发明人 ICHINOSHIME, TSUTOMU
分类号 B24B37/04;B24B37/30;H01L21/304 主分类号 B24B37/04
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