发明名称 DRY CLEANING SYSTEM USING A LASER
摘要 <p>A dry cleaning system is provided to rapidly remove contaminants existing on a cleaning target by using laser. A laser generating apparatus(20) generates a laser beam. A laser beam transferring apparatus(30) transfers the laser beam generated from the laser generating apparatus. A laser beam irradiating apparatus(40) adjusts the laser beam transferred by the laser beam transferring apparatus to irradiate the adjusted laser beam to a cleaning target. A scanning apparatus(50) adjusts the irradiation position of the laser beam of the laser beam irradiating apparatus, transferring the laser beam irradiating apparatus over the cleaning target.</p>
申请公布号 KR100797787(B1) 申请公布日期 2008.01.24
申请号 KR20050048026 申请日期 2005.06.03
申请人 发明人
分类号 H01L21/3065;B23K26/00;H01L21/268 主分类号 H01L21/3065
代理机构 代理人
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