| 摘要 |
PROBLEM TO BE SOLVED: To provide a solution coater preventing the thickness of a coating film from becoming large at the interface section between two coating solution applied with a time lag. SOLUTION: The solution coater 10 has a plurality of coating heads 16 having discharge holes 30, and discharges a solution through the discharge holes 30 of the coating heads 16 to form a coating film on a substrate S. A diffusion preventing member 54 for preventing the diffusion of a solvent atmosphere of the solution applied on the substrate S is provided between the coating head 16 and the coating head 16. COPYRIGHT: (C)2008,JPO&INPIT
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