| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supplying unit which stabilizes the quality of a gas supplying equipment which supplies a gas to a plurality of barometric-pressure type driving parts used for a treatment apparatus of a substrate. SOLUTION: A gas supplying unit 170 has a connecting block 182 of nearly rectangular parallelopiped shape, to one side 182a of which a magnetic valve block 180 consisting of a plurality of magnetic valves 190 and a speed controller block 181 consisting of a plurality of speed controllers 200 are connected. A first passage for making a magnetic valve 190 and a speed controller 200, which are corresponding each other, communicate and a second passage communicating from the speed controller 200 to other side 182b, are formed in the connecting block 182. A connecting port 222 is arranged in an output side of the second passage 211 of the other side 182b. A plurality of supplying pipes 160 communicating to each barometric-pressure type driving part are connected to the connecting port 222 through a multi-connector 230. COPYRIGHT: (C)2008,JPO&INPIT
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