AN OPTICAL SYSTEM AND METHOD FOR SUB-WAVELENGTH ENERGY CONCENTRATION

摘要

An optical system configured to direct radiation onto an object, said system comprising a source of radiation and a lens (3), said lens comprising an arrangement of features (13) configured to allow transmission of radiation from said source, the object being located at a distance from the lens (3) such that at least one caustic (5) due to diffraction of radiation through the features (13) is in focus on said object, said caustic (5) having at least one dimension which is smaller than the wavelength of the radiation from the source.