| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating technology for producing fine particle film of a desired pattern in an atmosphere of a room temperature with high productivity, without using organic solvent or almost without using organic solvent. SOLUTION: This method of forming the fine particle film on a coating object by coating fine particles at a room temperature and an atmospheric pressure, using carbon dioxide fluid in a supercritical state, has a fine particle film forming process, in which fine particles of several tenμm or less are injected in a high pressure vessel kept in a vacuum state or nearly vacuum state, the carbon dioxide fluid in a supercritical state is injected to the vessel, the particles and the fluid are agitated to form a mixture of the fine particles in a highly dispersed state with the carbon dioxide fluid in the supercritical state as a dispersion medium, and the mixture is sprayed onto the coating object from a nozzle to form film. When spraying the mixture onto the coating object, the fine particles are sprayed at speed of several ten or several thousand m/s by controlling the pressure of the critical state fluid and the distance between the nozzle and coating object. COPYRIGHT: (C)2008,JPO&INPIT |
