| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater unit capable of improving temperature uniformity of a heating object in heating the heating object. SOLUTION: A second thermal conductor 32 which is an inside portion in diameter direction of a shaft 22 has a lower thermal conductivity than a first thermal conductor 30 which is an outside portion in diameter direction of the shaft 22. Thereby, when heating state and non-heating state of a resistance heating element 18 are repeatedly switched over, the movement of heat from the top end part 22B to the base end part 22A side of the shaft 22 is suppressed at the second thermal conductor 32 compared with the first thermal conductor 30. As a result, in the portion opposed to the hollow part 42 of the shaft 22 out of a heater plate 16, the time during which the heating temperature of the heater plate 16 and, accordingly a wafer 28, reaches a desired temperature is shortened compared with a conventional heater unit. Accordingly, temperature uniformity of the wafer 28 heated by the heater plate 16 can be improved. COPYRIGHT: (C)2008,JPO&INPIT
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