| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning apparatus and method that reduce pinch effects. SOLUTION: A mirror unit 31 includes a mirror 71 and a rotation comb electrode unit R including rotation comb electrodes 72 on both blades of the mirror 71. The rotation comb electrode unit constituting both blades of the mirror 71 is composed of a first rotation comb electrode unit and a second rotation comb electrode unit. Driving units H1, H2 include driving comb electrodes 73. The rotation comb electrodes 72 and the driving comb electrodes 73 are alternately arranged with each other as shown in an ellipse with dotted line. The rotation comb electrodes are composed of a first comb electrode and a second comb electrode, while the driving comb electrodes are composed of a third comb electrode and a fourth comb electrode. COPYRIGHT: (C)2008,JPO&INPIT
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