ELECTRIC MACHINE ELEMENT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electric machine element which can reduce a gap length between a lower electrode and an upper electrode of a movable element thereof. SOLUTION: The electric machine element is composed of the movable element 25 having the lower electrode 23 and the upper electrode via a space 24 therebetween, and either one or both of the lower electrode 23 and the upper electrode 25 are formed of a laminated structure. COPYRIGHT: (C)2008,JPO&INPIT