POLYSILANE PROCESSING AND USE

摘要

The invention relates to a method for the final product-related manufacture of low-molecular, medium-molecular, and high-molecular halogenated polysilanes, the distillation thereof into selected fractions, the direct deposition of silicon from the gas phase or a liquid phase of polysilane mixtures or polysilanes, the hydrogenation or derivatization of halogenated polysilanes, and the processing into final products in an adequate system.