A METHOD FOR FABRICATING A PHOTONIC CRYSTAL OR PHOTONIC BANDGAP VERTICAL-CAVITY SURFACE-EMITTING LASER

摘要

The invention relates to fabrication of VCSELs. It provides a method for fabricating a VCSEL that contains a micro/nano-structured mode selective lateral layer, where the micro/nano-structured layer is obtained by well controlled local etching. The invention enables control of the micro/nano-structured layer thickness with very high precision. In particular, the invention relates to a method for fabricating a VCSEL with a micro/nano- structured mode selective layer for controlling the VCSELs transverse electromagnetic modes.