发明名称 |
Tubular Magnet Assembly |
摘要 |
A tubular magnet assembly mountable inside a cylindrical target to which the magnet assembly can relatively rotate or translate is disclosed. The magnet assembly discriminates itself from the state-of-the-art in that it comprises both a 'near' magnetic field for confinement of charge in the vicinity of the target in combination with a 'far' magnetic field reaching the substrate for guidance of charge towards the substrate. Such a magnet assembly also has the advantage that it is angularly directional and can be mounted centrally in an ion plating deposition unit.
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申请公布号 |
US2008017506(A1) |
申请公布日期 |
2008.01.24 |
申请号 |
US20070547309 |
申请日期 |
2007.07.13 |
申请人 |
BLONDEEL ANJA;DE BOSSCHER WILMERT |
发明人 |
BLONDEEL ANJA;DE BOSSCHER WILMERT |
分类号 |
H01F7/00;C23C14/35;H01J37/34 |
主分类号 |
H01F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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