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发明名称
摘要
申请公布号	JP4038021(B2)	申请公布日期	2008.01.23
申请号	JP20000546392	申请日期	1998.04.24
申请人		发明人
分类号	H01L21/60;H01L21/56;H01L23/12;H01L23/28;H01L23/31;H01L23/498	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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