CVD APPARATUS AND METHOD OF CLEANING THE CVD APPARATUS

摘要

It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced. In a CVD apparatus for supplying a reactive gas into a reaction chamber and forming a deposited film on a surface of a base material provided in the reaction chamber, an exhaust gas recycling path for recycling an exhaust gas reaching the reaction chamber from the downstream side of a pump is provided on an exhaust path for exhausting a gas from an inner part of the reaction chamber through the pump.