发明名称 |
METHOD OF PREPARING ZINC OXIDE NANORODS ON A SUBSTRATE BY CHEMICAL SPRAY PYROLYSIS |
摘要 |
<p>A method of preparing nanostructured zinc oxide layers on a substrate by chemical spray pyrolysis at moderate deposition temperatures from 350° C. to 600° C. is disclosed. An aqueous or aqueous alcoholic solution comprising zinc chloride or zinc acetate as precursors is prepared and sprayed onto the preheated substrate so that the precursor reacts to form zinc oxide layer on the substrate. Thiourea or urea may be also added to the solution. Glass, silicon, or metal oxide covered glass can be used as the substrate.</p> |
申请公布号 |
EP1880413(A1) |
申请公布日期 |
2008.01.23 |
申请号 |
EP20060722972 |
申请日期 |
2006.04.13 |
申请人 |
TALLINN UNIVERSITY OF TECHNOLOGY |
发明人 |
KRUNKS, MALLE;OJA, ILONA;DEDOVA, TATJANA |
分类号 |
H01L21/368;C23C18/12 |
主分类号 |
H01L21/368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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